OptoFab Node


Specific capabilities: laser machining; photolithography; lithium niobate device fabrication; and optical fibre fabrication.

The Macquarie/ATP node offers specialist services in the micro processing of both planar and bulk optical materials, such as, silica, silicon, lithium niobate and polymers to provide a range of complementary microphotonic technology platforms for applications including telecoms, biotechnology, biomedicine, microelectronics, optical sensing, industrial processing, defence and security.

The node is headquartered at Macquarie University and incorporates the Bandwidth Foundry International, the University of Sydney and the University of Adelaide.

Included in the services offered is a 'start to finish' service in planar lightwave circuit fabrication via the initial creation of a lithographic mask (Bandwidth Foundry), production of an integrated optoelectronic chip (Macquarie) and excellent signal throughput via efficient coupling to purpose-designed mode matched fibres (Adelaide).

Macquarie University - Laser Micromachining Solutions
LMS lasers cover the ultra-violet, visible and infra-red wavelengths and are suitable for processing the majority of metals, ceramics, polymers, glasses and crystalline materials. Feature sizes as small as 10 microns in metals and 1 micron in some crystalline materials can be achieved.

Microstructured optical materials produced at the facility include: surface gratings in lithium niobate, diffractive optics, silicon-based THz antennas, amplitude masks for spectroscopy, Hartmann wavefront sensor plates and laser machined end-facets for planar lightwave devices. NCRIS funding for this facility will support a dedicated technical officer to support access to these state-of-the-art microstructuring facilities.

Bandwidth Foundry International
BFI provides prototyping facilities and services to developers of photonics integrated circuits. The group specialises in photolithography foundry services including photomask production and direct laser writing of optical materials.

Services offered under the NCRIS program include provision of external access to:

  1. a lithium niobate fabrication plant enabling the production of a range of periodically-poled lithium niobate components for wavelength conversion.
  2. direct write photolithography using a Heidelberg Instruments DWL 200, a proven quality manufacturing tool used worldwide for mask making and direct writing. The facility produces structures with a resolution down to 0.8um in its class 100 clean room. 


University of Sydney: Speciality Fibre Fabrication

A range of speciality fibres for exacting research requirements can be produced including microstructured polymer fibres.

 Fibre fabrication facilities include a complete suite of equipment for fabricating microstructured polymer optical fibres, advanced tapering facilities for substantially modifying the properties of a wide range of fibre types and key specialised (EXFO) characterisation equipment.

Contact Details

OptoFab Node Director: A./Prof. Michael Withford
Email: withford@ics.mq.edu.au
Phone: 02 9850 7056

Laser Micromachining Solutions: www.lasermicro.com.au

Bandwidth Foundry International: www.bwfoundry.com

USyd Speciality Fibre Fabrication: www.usyd.edu.au/ipos/research/facilities/optofab.shtml



Instrumentation Available


MQU Laser Microfab

  • Nanosecond laser microfabrication facility
  • Femtosecond laser microfabrication facility (on a limited basis)
  • Reflection phase contrast microscope (Olympus)
  • Transmission phase contrast microscope (Olympus)
  • Metrology microscope
  • Pre and post processing equipment (ultrasonic drills, optical polishing equipment etc)


  • HeidelbergInstruments Direct Write Laser 200
  • 3 wet benches
  • UV fusion oven
  • Karl Suss Model Ct/62 Spin Coater
  • Lasertec Scanning Laser Microscope
  • Karl Suss Model PM5 Probe Stat 
  • PM-Plast Mask Cleaning Wet Bench
  • Nikon Optiphot Model 150 Microscope
  • PMS Handilaz Particle Counter
  • Dektak 8 Adv Stylus Profiler
  • Mask aligner
  • Electrical Poling System
  • Annealed Proton Exchange System  
  • Annealing oven
  • Reverse Proton Exchange System   
  • Dicing saw
  • Lapping machine  
  • Polishing machine  
  • Inspection microscope  
  • Metricon Prism Coupler
  • Design Tools   

Speciality Fibre Fabrication

  • Optical Fibre Characterisation (EXFO NR9200 HR)
  • PolymerFibre Draw Tower
  • Fibre Tapering Facility  




Funding Sources